EUV Replicated Optics

Overview


Rigaku Innovative Technologies Europe s.r.o. (RITE) implements cutting edge technologies in the ray tracing, design, manufacturing and testing X-ray optics for EUV, XUV and X-ray radiation. RITE’s primary focus has been research & development projects which have resulted in an extension of Rigaku’s X-ray optics and detectors for EUV/XUV, Hard and Soft X-rays.

To achieve larger and bigger optics, RITE is using manufacturing techniques other than replication. Proprietary techniques and processes enable RITE to commercially produce optics with a diameter of up to 300 mm and segment lengths of up to 250 mm. When several segments are combined, optics lengths of up to 1000 mm are easily produced.


RITE Laboratory

EUV Replicated Optic

EUV Replicated Optics




Ruthenium-coated ellipsoidal optics, 340 mm x 90 mm (diameter). CAD drawing (left) and finished product (right)

Technical Specifications


Micro roughness of NiP layer:

 Average Roughness Ra (nm)  Root Mean Square RMS (nm)
10 μm × 10 μm  0.861.12
10 μm × 10 μm0.881.15
1 μm × 1 μm0.40.52
1 μm × 1 μm0.470.59


Micro roughness of Ru layer:

 Average Roughness Ra (nm)  Root Mean Square RMS (nm)
10 μm × 10 μm  0.720.91
1 μm × 1 μm0.270.34


Figure error precision:


Measurement on Taylor – Hobson profilometer. Before polishing a value of RMS (Δr) = 1.14 μm was measured, after polishing RMS (Δr) = 0.109 μm was achieved!

The RITE optical group is comprised of the Czech Republic´s leading researchers in the field of advanced X-ray optics, all of whom have developed various manufacturing technologies and optical innovations in the field of X-ray optics. Contact RITE to learn how our team of experts can assist you with your optical requirements and answer any questions that you may have.

Contact Us


Rigaku Innovative Technologies Europe s.r.o, (RITE)
Novodvorska 994, Praha 4-142 21, Czech Republic
Phone: +420 239 042 500
Email: sales.prague@Rigaku.com

Dr. Peter Oberta
Sales and R&D Project Manager