CCD & sCMOS Detectors

Overview


In 2008, Rigaku Innovative Technologies Europe s.r.o. (RITE) became part of the Rigaku Corporation. RITE’s primary focus has been research & development projects which have resulted in an extension of Rigaku’s X-ray optics and detectors for EUV/XUV, Hard and Soft X-rays.

CCD, sCMOS and PIN Diode Based Detectors

RITE has developed and manufactures CCD and sCMOS X-ray imaging detectors both of which contain the highest spatial resolution commercially available. They are called the XSight™ LC and XSight™ FC detectors.

XSight™ LC Camera

The XSight™ LC detector contains an interchangeable coupled lens, enabling users to continuously change the field of view and the corresponding spatial resolution. The available field of view ranges from 0.9 × 0.7 to 14.4 × 10.8 mm, with a corresponding spatial resolution of 0.4 μm or higher. The XSight™ LC camera is available in CCD or sCMOS versions.

Customer References Include

XSight™ Micron LC X-ray CCD camera

The Rigaku XSight™ Micron LC is an ideal compact two dimensional (2D) X-ray CCD or sCMOS camera optimized for use in micron and submicron applications such as X-ray microscopy, X-ray tomography and metrology.

Applications

Compact Robust Designs

The XSight™ Micron LC camera has a robust body preventing any scattered X-rays from hitting the CCD or sCMOS sensor directly and thus raising noise. The camera can be easily mounted via M6 threads on the bottom of the camera body.

Easy Installation and Operation

The XSight™ Micron LC camera is a one package instrument. Data from the camera is transferred via high speed USB2.0. No additional electronics box, special computer board or water chiller is necessary. Simply plug a USB2.0 cable into your computer and start taking images! The intuitive software offers all the basic tools required.

XSight™ Micron X-ray CCD Camera Model LC — Lens Units Specifications

Up to five different lens units can be used with Rigaku XSight™ Micron LC Camera Body. Thanks to bayonet type mounts, all lens units can be easily and quickly changed. Their housing prevents any scattered X-rays from hitting a CCD or sCMOS sensor directly and thus raising noise.



XSight™ LC Lens Unit

Specifications of Lens Units

Technical features   
Field of view  Model LC 0270    0.90 mm (H) x 0.68 mm (V)
  Model LC 0540    1.80 mm (H) x 1.35 mm (V)
  Model LC 1080    3.60 mm (H) x 2.70 mm (V)
  Model LC 2160    7.20 mm (H) x 5.40 mm (V)
  Model LC 4320    14.40 mm (H) x 10.80 mm (V)  
  Effective pixel size    Model LC 0270    0.27 µm
  Model LC 0540    0.54 µm
  Model LC 1080    1.08 µm
  Model LC 2160    2.16 µm
  Model LC 4320    4.32 µm
Max. resolvable
pattern via JIMA
RT RC-02 (center   
area, 8 keV)
  Model LC 0270    0.4 µm
  Model LC 0540    0.6 µm
  Model LC 1080    1.5 µm
  Model LC 2160    3.0 µm
  Model LC 4320    7.0 µm
Spectral range  5 keV – 30 keV
Dimension   68.8 mm (v) x 78.0 mm (dia.)
Weight  1.3 kg (LC 0270 to LC 2160)
  1.5 kg (LC 4320)
Environmental conditions
Maximal operational
ambient temperature
  TBD
Relative humidity,
non condensing
  10% to 90%

XSight™ LC CCD Specifications

 Technical features  
Field of view  Selectable:
  from 0.90 mm (H) x 0.68 mm (V)
  to 14.40 mm (H) x 10.80 mm (V) 
  Effective pixel size    According to selected field of view:
  From 0.27 µm to 4.32 µm
Number of pixels   3300 x 2500
Spectral range  3 keV – 30 keV
Dynamic range   3100 : 1 (70dB)
Acquisition gain  0.45 e-/ADU
Readout noise  10 e- rms
Readout rate  approx. 1 frame per sec
Dark current  0.02 e-/pix./s
Binning  independent binning in x, y
Remote triggering  input / output trigger
Data interface  USB2.0
Sensor type  CCD

XSight™ LC sCMOS

 Technical features  
Array size    2048(H) x 2048(V)
Pixel size   6.5 um
Sensor diagonal   18.8 mm
Nonlinearity   0.2%
Dynamic range   21 400 : 1
Acquisition gain   0.55 e-/ADU
Readout noise   1.4 e- rms
Readout rate   40 fps (@ 16 bit)
Dark current   0.14 e-/pix./s 0ºC (air-cooled)
   0.04 e-/pix./s -10ºC (water-cooled)
Binning   2 x 2, 3 x 3, 4 x 4, 8 x 8
   Peak quantum efficiency      0.82
Remote triggering   input / output trigger
Shutter type   Rolling shutter
Data interface   USB 3.0
Sensor Type   sCMOS

Photo of a tick

0.4 micron resolution

XSight™ FC CCD and sCMOS


The XSight™ µRapid (sCMOS version) is a compact and fast two dimensional (2D) X-ray Camera composed of thin phosphor screen, fiber optics and a camera. The XSight™ FC camera is a fiber optics coupled camera that is approximately 20x more sensitive when compared to the XSight™ LC version. The XSight™ FC has a spatial resolution of 8 μm and 16 microns. The XSight™ FC camera is also available in a CCD version.


XSight™ µRapid Camera

Applications

  • X-ray Microscopy
  • X-ray Topography
  • X-ray Optics Adjustment & Metrology
  • X-ray Imaging

Compact Robust Design

The XSight™ μRapid camera has a robust body preventing any scattered X-rays from hitting an image sensor directly and thus raising noise. The camera can be easily mounted to any custom holder via ¼" 20 UNC thread on bottom of the camera body.

Easy Installation and Operation

The XSight™ µRapid Camera is a one package instrument. Data from the camera is transferred via Camera Link Full (10 taps, 85 MHz). This intuitive software offers all basic tools required.

XSight™ FC sCMOS Specifications

 Technical features  
Fiber optics  1 : 1 (other magnification / demagnification
  ratios on request)
Field of view  13.3 mm (H) x 13.3 mm (V)
Effective pixel size  6.5 µm
Spatial resolution (FWHM)    < 20 µm (@ 8 keV)
Spectral range  5 keV – 30 keV
Dynamic range  20000 : 1 (fast scan)
  21430 : 1 (slow scan)
Readout noise  1.5 (e- rms, fast scan)
  1.4 (e- rms, slow scan)
Frame rate  100 (fps @ full resolution, fast scan)
  35 (fps @ full resolution, slow scan)
Cooling temperature  +5°C stabilized, with forced air or
  water cooling (up to 30°C ambient)
Dark current  < 0.5 e-/pix./s
Binning  1 x 1, 2 x 2, 4 x 4
Remote triggering  yes
Data interface  Camera Link Full (10 taps, 85 MHz)

XSight™ Micron X-ray CCD Camera Model FC


The Rigaku XSight™ Micron FC is an ideal compact two dimensional (2D) X-ray CCD camera optimized for use in applications as diverse as X-ray microscopy, X-ray topography, X-ray optics adjustment and metrology. The XSight™ Micron FC camera is composed of a thin phosphor screen, fiber optics and a CCD camera. The CCD camera itself contains a full frame CCD image sensor with 3326 (H) x 2504 (V) pixels.


XSight™ Micron FC5400

XSight™ Micron FC2160

Applications

  • X-ray Microscopy
  • X-ray Topography
  • X-ray Optics Adjustment & Metrology
  • X-ray Imaging

Compact Robust Design

The XSight™ Micron FC camera has a robust body preventing any scattered X-rays from hitting the CCD sensor directly and thus raising noise. The camera can be easily mounted to any custom holder via two M6 threads on the bottom of the camera body.


Easy Installation and Operation

The XSight™ Micron FC camera is a one package instrument. Data from the camera is transferred via high speed USB2.0. No additional electronics box, special computer board or water chiller is necessary. Just plug a USB2.0 cable into your computer and start taking images! Intuitive software offers all basic tools required.

XSight™ FC CCD Specifications

 Technical features  
Nominal Field
of view
  Model FC 5400    18.0 mm (H) x 13.5 mm (V)
  Model FC 2160    7.2 mm (H) x 5.4 mm (V)
Nominal effective
pixel size
  Model FC 5400    5.40 µm
  Model FC 2160    2.16 µm
Typical spatial
  resolution (FWHM)  
  Model FC 5400    16 µm (@ 8 keV)
  Model FC 2160    8 µm (@ 8 keV)
Spectral range  5 keV – 30 keV
Typical dynamic range  3100 : 1 (70dB)
Typical acquisition gain  0.45 e-/ADU
Typical readout noise  10 e- rms
Readout rate  8 Mpix./s (approx. 1 frame per second)
Typical dark current  0.02 e-/pix./∙s @ -30°C
Binning  independent binning in x, y
Remote triggering  input / output trigger
Data interface  USB 2.0

xPIN™ Diode Metrology Detector


RITE completes its portfolio of detectors by offering users a metrology PIN diode detector called the xPIN™. The xPIN™ features a compact and flexible design ideal for applications ranging from alignment and testing of laboratory devices to long term precision monitoring of X-ray intensity and is the ideal solution when intensity monitoring or beam alignment is of importance.

The detector can be easily used as a hand-held monitor or can be used with the sensor head fixed to the optical bench. The detector has its own long life internal battery. The recharging or power supply operation can be done through a standard USB cable from any USB device. While connected to the PC, the USB cable also serves to transfer data. Various sensor types and filter foils enable the xPIN™ to be used for a broad range of energies covering EUV to X-ray radiation.

The xPIN™ is available to cover a wide range of energies from EUV/XUV to Hard X-rays. While the xPIN™ typically gives a relative intensity value, a calibrated version is available. Finally, for EUV applications both pulsed and continuous versions are available.






Features

  • Scientific Grade
  • Compact Robust Design
  • Flexible Operation
  • Cost Effective
  • For EUV/X-ray Region

Applications

  • X-ray Beam Intensity Monitoring
  • X-ray Optics Alignment
  • General Tools for Service Engineers

Specifications – Detector body

Detector
Mode of operation  Photovoltaic (unbiased)
  Biased (+2.5 V or -2.5 V)
Design  A/V converter + digital voltmeter
Ranges (six digits)  200 nA full scale, resolution 1 pA
  (+/-) 400 nA (unipolar), res. 1 pA
  20 µA full scale, resolution 0.1 nA
  (+/-) 40 µA (unipolar), res. 0.1 nA
Read out rate  2.5 / s
Analog output  2.5 V max. signal (log. scale)
  1 V/decade
Weight/dimensions  200 g (detector body)
  850 g (with all accessories)
Power supply
Battery  Built in Li-Pol rechargeable 3.7 V, 
  1100 mAh, protected cell
Battery charge current  200 mA (USB – PC connection), or
  330 mA (battery charger)
Battery life  72 hrs typ.
External  5 VDC via USB Micro B connector
  Environmental  conditions
Ambient operational
temperature range
  0°C to 40°C
Relative humidity,
non-condensing
  0 to 80 %
Accessories
Signal cable  1.5 m (standard cable), SMB
USB (data/power) cable  3 m USB A to USB Micro B
Charger  Universal USB
Documentation  On USB memory stick
  Protective / carrying case    Reinforced textile
Optional  Pinholes, filters, mechanical adaptors, 
  cables (see separate list)

Specifications – Standard sensors

X-rayEUV
Spectral range4 keV to 27 keV 
  (above 10 % of peak sensitivity)  
AXUV100G
  PIN diode active area  10 mm × 10 mm  10 mm × 10 mm  
Light sensitivityLight tightNo
Vacuum compatibleYesYes
Ambient operational 
temperature range
-20°C to 50°C-10°C to 40°C
Dimensions (a × b)Ø28 × 23.5 (mm)Ø30 × 25 (mm)

The RITE optical group is comprised of the Czech Republic´s leading researchers in the field of advanced X-ray optics, all of whom have developed various manufacturing technologies and optical innovations in the field of X-ray optics. Contact RITE to learn how our team of experts can assist you with your optical requirements and answer any questions that you may have.

Contact Us


Rigaku Innovative Technologies Europe s.r.o, (RITE)
Novodvorska 994, Praha 4-142 21, Czech Republic
Phone: +420 239 042 500
Email: sales.prague@Rigaku.com

Dr. Peter Oberta
Sales and R&D Project Manager