CCD & sCMOS Detectors
In 2008, Rigaku Innovative Technologies Europe s.r.o. (RITE) became part of the Rigaku Corporation. RITE’s primary focus has been research & development projects which have resulted in an extension of Rigaku’s X-ray optics and detectors for EUV/XUV, Hard and Soft X-rays.
RITE has developed and manufactures CCD and sCMOS X-ray imaging detectors both of which contain the highest spatial resolution commercially available. They are called the XSight™ LC and XSight™ FC detectors.
| Technical features | ||
| Field of view | Model LC 0270 | 0.90 mm (H) x 0.68 mm (V) |
| Model LC 0540 | 1.80 mm (H) x 1.35 mm (V) | |
| Model LC 1080 | 3.60 mm (H) x 2.70 mm (V) | |
| Model LC 2160 | 7.20 mm (H) x 5.40 mm (V) | |
| Model LC 4320 | 14.40 mm (H) x 10.80 mm (V) | |
| Effective pixel size | Model LC 0270 | 0.27 µm |
| Model LC 0540 | 0.54 µm | |
| Model LC 1080 | 1.08 µm | |
| Model LC 2160 | 2.16 µm | |
| Model LC 4320 | 4.32 µm | |
| Max. resolvable pattern via JIMA RT RC-02 (center area, 8 keV) | Model LC 0270 | 0.4 µm |
| Model LC 0540 | 0.6 µm | |
| Model LC 1080 | 1.5 µm | |
| Model LC 2160 | 3.0 µm | |
| Model LC 4320 | 7.0 µm | |
| Spectral range | 5 keV – 30 keV | |
| Dimension | 68.8 mm (v) x 78.0 mm (dia.) | |
| Weight | 1.3 kg (LC 0270 to LC 2160) 1.5 kg (LC 4320) | |
| Environmental conditions | ||
| Maximal operational ambient temperature | TBD | |
| Relative humidity, non condensing | 10% to 90% | |
| Technical features | |
| Field of view |
Selectable: from 0.90 mm (H) x 0.68 mm (V) to 14.40 mm (H) x 10.80 mm (V) |
| Effective pixel size |
According to selected field of view: From 0.27 µm to 4.32 µm |
| Number of pixels | 3300 x 2500 |
| Spectral range | 3 keV – 30 keV |
| Dynamic range | 3100 : 1 (70dB) |
| Acquisition gain | 0.45 e-/ADU |
| Readout noise | 10 e- rms |
| Readout rate | approx. 1 frame per sec |
| Dark current | 0.02 e-/pix./s |
| Binning | independent binning in x, y |
| Remote triggering | input / output trigger |
| Data interface | USB2.0 |
| Sensor type | CCD |
| Technical features | ||
| Array size | 2048(H) x 2048(V) | |
| Pixel size | 6.5 um | |
| Sensor diagonal | 18.8 mm | |
| Nonlinearity | 0.2% | |
| Dynamic range | 21 400 : 1 | |
| Acquisition gain | 0.55 e-/ADU | |
| Readout noise | 1.4 e- rms | |
| Readout rate | 40 fps (@ 16 bit) | |
| Dark current | 0.14 e-/pix./s 0ºC (air-cooled) 0.04 e-/pix./s -10ºC (water-cooled) | |
| Binning | 2 x 2, 3 x 3, 4 x 4, 8 x 8 | |
| Peak quantum efficiency | 0.82 | |
| Remote triggering | input / output trigger | |
| Shutter type | Rolling shutter | |
| Data interface | USB 3.0 | |
| Sensor Type | sCMOS | |
_XSight_Micron_enhanced_scale.jpg)
The XSight™ µRapid (sCMOS version) is a compact and fast two dimensional (2D) X-ray Camera composed of thin phosphor screen, fiber optics and a camera. The XSight™ FC camera is a fiber optics coupled camera that is approximately 20x more sensitive when compared to the XSight™ LC version. The XSight™ FC has a spatial resolution of 8 μm and 16 microns. The XSight™ FC camera is also available in a CCD version.
| Technical features | |
| Fiber optics |
1 : 1 (other magnification / demagnification ratios on request) |
| Field of view | 13.3 mm (H) x 13.3 mm (V) |
| Effective pixel size | 6.5 µm |
| Spatial resolution (FWHM) | < 20 µm (@ 8 keV) |
| Spectral range | 5 keV – 30 keV |
| Dynamic range | 20000 : 1 (fast scan) 21430 : 1 (slow scan) |
| Readout noise | 1.5 (e- rms, fast scan) 1.4 (e- rms, slow scan) |
| Frame rate | 100 (fps @ full resolution, fast scan) 35 (fps @ full resolution, slow scan) |
| Cooling temperature | +5°C stabilized, with forced air or water cooling (up to 30°C ambient) |
| Dark current | < 0.5 e-/pix./s |
| Binning | 1 x 1, 2 x 2, 4 x 4 |
| Remote triggering | yes |
| Data interface | Camera Link Full (10 taps, 85 MHz) |
The Rigaku XSight™ Micron FC is an ideal compact two dimensional (2D) X-ray CCD camera optimized for use in applications as diverse as X-ray microscopy, X-ray topography, X-ray optics adjustment and metrology. The XSight™ Micron FC camera is composed of a thin phosphor screen, fiber optics and a CCD camera. The CCD camera itself contains a full frame CCD image sensor with 3326 (H) x 2504 (V) pixels.
The XSight™ Micron FC camera has a robust body preventing any scattered X-rays from hitting the CCD sensor directly and thus raising noise. The camera can be easily mounted to any custom holder via two M6 threads on the bottom of the camera body.
| Technical features | ||
|
Nominal Field of view | Model FC 5400 | 18.0 mm (H) x 13.5 mm (V) |
| Model FC 2160 | 7.2 mm (H) x 5.4 mm (V) | |
| Nominal effective pixel size | Model FC 5400 | 5.40 µm |
| Model FC 2160 | 2.16 µm | |
| Typical spatial resolution (FWHM) | Model FC 5400 | 16 µm (@ 8 keV) |
| Model FC 2160 | 8 µm (@ 8 keV) | |
| Spectral range | 5 keV – 30 keV | |
| Typical dynamic range | 3100 : 1 (70dB) | |
| Typical acquisition gain | 0.45 e-/ADU | |
| Typical readout noise | 10 e- rms | |
| Readout rate | 8 Mpix./s (approx. 1 frame per second) | |
| Typical dark current | 0.02 e-/pix./∙s @ -30°C | |
| Binning | independent binning in x, y | |
| Remote triggering | input / output trigger | |
| Data interface | USB 2.0 | |
RITE completes its portfolio of detectors by offering users a metrology PIN diode detector called the xPIN™. The xPIN™ features a compact and flexible design ideal for applications ranging from alignment and testing of laboratory devices to long term precision monitoring of X-ray intensity and is the ideal solution when intensity monitoring or beam alignment is of importance.
The detector can be easily used as a hand-held monitor or can be used with the sensor head fixed to the optical bench. The detector has its own long life internal battery. The recharging or power supply operation can be done through a standard USB cable from any USB device. While connected to the PC, the USB cable also serves to transfer data. Various sensor types and filter foils enable the xPIN™ to be used for a broad range of energies covering EUV to X-ray radiation.
The xPIN™ is available to cover a wide range of energies from EUV/XUV to Hard X-rays. While the xPIN™ typically gives a relative intensity value, a calibrated version is available. Finally, for EUV applications both pulsed and continuous versions are available.
| Detector | ||
| Mode of operation |
Photovoltaic (unbiased) Biased (+2.5 V or -2.5 V) | |
| Design | A/V converter + digital voltmeter | |
| Ranges (six digits) | 200 nA full scale, resolution 1 pA (+/-) 400 nA (unipolar), res. 1 pA 20 µA full scale, resolution 0.1 nA (+/-) 40 µA (unipolar), res. 0.1 nA | |
| Read out rate | 2.5 / s | |
| Analog output | 2.5 V max. signal (log. scale) 1 V/decade | |
| Weight/dimensions | 200 g (detector body) 850 g (with all accessories) | |
| Power supply | ||
| Battery |
Built in Li-Pol rechargeable 3.7 V, 1100 mAh, protected cell | |
| Battery charge current |
200 mA (USB – PC connection), or 330 mA (battery charger) | |
| Battery life | 72 hrs typ. | |
| External | 5 VDC via USB Micro B connector | |
| Environmental conditions | ||
| Ambient operational temperature range | 0°C to 40°C | |
| Relative humidity, non-condensing | 0 to 80 % | |
| Accessories | ||
| Signal cable | 1.5 m (standard cable), SMB | |
| USB (data/power) cable | 3 m USB A to USB Micro B | |
| Charger | Universal USB | |
| Documentation | On USB memory stick | |
| Protective / carrying case | Reinforced textile | |
| Optional | Pinholes, filters, mechanical adaptors, cables (see separate list) | |
| X-ray | EUV | |
| Spectral range | 4 keV to 27 keV (above 10 % of peak sensitivity) | AXUV100G |
| PIN diode active area | 10 mm × 10 mm | 10 mm × 10 mm |
| Light sensitivity | Light tight | No |
| Vacuum compatible | Yes | Yes |
| Ambient operational temperature range | -20°C to 50°C | -10°C to 40°C |
| Dimensions (a × b) | Ø28 × 23.5 (mm) | Ø30 × 25 (mm) |
The RITE optical group is comprised of the Czech Republic´s leading researchers in the field of advanced X-ray optics, all of whom have developed various manufacturing technologies and optical innovations in the field of X-ray optics. Contact RITE to learn how our team of experts can assist you with your optical requirements and answer any questions that you may have.
Cavan Huang
Beijing Top-Unistar Science & Technology Co., LTD.
No.1 Xinxi Road, Hai-Dian District, Beijing, China